Most recently posted data are here. The San Francisco Fed has a page with a graph and selected data.

Background paper is John Fernald, “A Quarterly, Utilization-Adjusted Series on Total Factor Productivity.” Federal Reserve Bank of San Francisco Working Paper Series 2012-19, Updated April 2014.

Archived datasets are below. This should be all the vintages that I have posted online plus a few earlier ones. The readme to each spreadsheet describes key changes and their timing. Old versions (pre-2009, especially) are typically less refined.

TFP Archive